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HORIBA

HORIBA Resistivity Meter for Semiconductor Cleaning Processes HE-480R(W)

HORIBA Resistivity Meter for Semiconductor Cleaning Processes HE-480R(W)

$2,461.54 USD
$2,461.54 USD
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* Please consult before ordering

Resistivity Meter for Semiconductor Cleaning Processes

HE-480R(W)

A specific resistance meter ideal for monitoring the purity of ultra-pure water used in cleaning processes.

It accurately measures ultra-pure water during processes thanks to its microprocessor integration.  This contributes to purity monitoring of ultra-pure water used as the final cleaning water for silicon wafers and other applications.

Product name Industrial resistance meter
Model HE-480R
Measurement method Electrode type (2-electrode method)
Cell constant 0.01 / cm
Temperature sensor
specifications		 Platinum resistance 1000 Ω / 0 °C
Measuring range Measurement unit kΩ·m 0 to 2.00 0 to 20.0 0 to 200.0 0 to 1000 *
MΩ·cm 0 to 0.200 0 to 2.00 0 to 20.00 0 to 100.0 *
*: Measurable without temperature compensation
Temperature: 0 °C to 100 °C (Select your desired decimal point from 0, 1, and 2 digits.)
Repeatability Within ± 0.5 % of the full scale (in equivalent input)
Linearity Within ± 0.5 % of the full scale (in equivalent input)
Transmission
output		 4 mA to 20 mA DC: input / output isolated type
Maximum load resistance: 900 Ω
Transmission output range: Freely selectable within the measurement range
Contact output Outputs: 2 points
Alarm contact output (R1 and R2)
Contact type: relay contact, SPDT (1c)
Contact rating: 240 V AC, 3 A and 30 V DC, 3 A (resistance load)
Contact function: selectable from upper / lower limit operation (ON / OFF control), alarm, and maintenance.
Transmission
output hold feature
  • Previous value hold
  • Optional value hold
  • Continuous
Selectable from the above (However, only the previous value hold is available in the maintenance Mode.)
Self-diagnosis
function
  • Sensor diagnosis
  • Out of the measurement range
  • A/D converter scale over
  • Converter error
Temperature
compensation
  • Based on the temperature characteristics of extra deionized water (reference temperature: 25 °C)
  • Based on the reference temperature and user-defined temperature coefficient (reference temperature: 5 °C to 95 °C)
  • No temperature compensation
Temperature - compensated range 0 °C to 100 °C
Power supply Rated voltage 100 V to 240 V AC, 50 / 60 Hz, 10 VA (max.)
Structure Indoor-use panel installation type
Panel: IP65 dust and water proof structure
Protective structure Panel: IP65 (IEC60529, JIS C0920)
Conforming standards CE Marking
FCC Rule
External
dimensions		 48 (W) mm x 96 (H) mm x 115 (D) mm
Case depth: approx. 105 mm (when panel-mounted)
Mass Approx. 400 g
Compatible
sensors		 ERF-series, cell constant 0.01 / cm
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