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HORIBA

HORIBA Non-Contact Chemical Concentration Monitor CS-900

HORIBA Non-Contact Chemical Concentration Monitor CS-900

$5,846.15 USD
$5,846.15 USD
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* Please consult before ordering

Non-Contact Chemical Concentration Monitor

CS-900

A chemical concentration monitor designed to measure chemicals used in semiconductor manufacturing processes such as cleaning and etching in a non-contact manner.

Enabling safe and stable concentration monitoring without the risk of chemical leaks or contamination by measuring flowing chemicals inside the pipes without direct contact.

Model name Non-contact type chemical concentration monitor
Model CS-900
Measurement method Absorption spectroscopy
Concentration calculation Temperature compensated multivariate analysis
Measurement range/
Repeatability (mass%)

Model name

 Component Measurable range Repeatability Analog output range
CS-900-1P-1P25P5 NH3 0.00%-1.20% ±0.05% 0.00-10.00
H2O2 0.00%-5.50% ±0.10% 0.00-10.00
H2O 93.3%-100.0% ±1.0%

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CS-900-1P-P8P8

 NH3 0.20%-0.80% ±0.03% 0.00-1.00
H2O2 0.20%-0.80% ±0.03% 0.00-1.00
H2O 98.4%-99.6% ±0.3%

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Conditions of measurement

 1) Measurement Frequency: every 3 seconds
2) Moving average : 16 times

Tube

 PFA tube 1inch or 3/4inch (Do NOT use anti-static type PFA tube)

Sample condition*1

 Sample temperture : 20 to 80°C
Sample temperture, Atmospheric temperture fluctuation :
±1 degree C (period of time: 1 hour)
Sample pressure : Less than 0.2 MPa (G)
Sample pressure fluctuation : Within 0.02 MPa

Power source

 DC 24V

Power consumption

 Apporox. 30W (Transient electric current at the time of start is excluded)
Weight Display unit : Apporox. 0.9kg
Sensor unit: Apporox. 2.9kg
Dimension (WxDxH) Display unit : 96x135x96mm
Sensor unit: 238x135x190mm
Slanting angle Sensor unit:
Vertical direction within ±3 degree
Lateral direction 0 to 90 degree
Light source 5years
communication Parallel I/O, RS-232C, Analog output
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