HORIBA
HORIBA Low Concentration Type HF/HCl/NH3 Concentration Monitor HF-960M
HORIBA Low Concentration Type HF/HCl/NH3 Concentration Monitor HF-960M
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Low Concentration Type HF/HCl/NH3 Concentration Monitor
HF-960M
A concentration monitor ideal for high-precision measurements of low-concentration hydrofluoric acid, hydrochloric acid, and ammonia.
With a sensor that has excellent corrosion resistance, it can accurately and quickly measure low concentrations of hydrofluoric acid, hydrochloric acid as well as ammonia. This makes it ideal for single wafer cleaning and batch cleaning applications.
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Product name |
Low Concentration Type HF / HCl / NH3 Concentration Monitor |
|---|---|
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Model |
HF-960M |
| Measurement range | HF: 0 - 5000 ppm, HCl: 0 - 5000 ppm, NH3: 0 - 10000 ppm, Conductivity:0 - 50.0 mS/cm |
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Power supply |
Rated voltage 24 V DC, 10 W (max) |
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Structure |
Iindoor-use, panel installation type, panel case : ABS, terminal : PBT, Panel : IP65 dust and water proof structure |
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External dimensions |
96 (W) x 96 (H) x 115 (D) mm, Case depth : approx.105 (when panel-mounted) |
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Weight |
Approx. 550 g |
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Conforming standards |
CE marking, FCC Part15 |
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Compatible sensors |
FS-10F series flow-type sensor |
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