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HORIBA

HORIBA In-line Sensor & Auto Range Switching Concentration Monitor HF-960EM

HORIBA In-line Sensor & Auto Range Switching Concentration Monitor HF-960EM

$2,461.54 USD
$2,461.54 USD
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In-line Sensor & Auto Range Switching Concentration Monitor

HF-960EM

A hydrofluoric acid concentration monitor that complies with the sanitary standards for semiconductor processes.

Incorporating a sensor with completely PFA (perfluoroalkoxy) wetted parts, size is optimized to the absolute limit.  It can also handle wide-range measurements up to 50% HF concentration, matching the sanitary requirements in semiconductor processes.

Model name HF-960EM
Measurement range HF: 0 - 50%, HCl: 0 - 10%, Conductivity: 0 - 2000 mS/cm
Repeatability +/- 0.5% F.S. (in equivalent input)
Linearity +/- 0.5% F.S. (in equivalent input)
Transmission output Number of output: 4
Contact output Outputs: 5 points
Contact input Inputs: 2 points
Communication output RS-485
Power supply DC 24 V +/- 10% 15W
Compatible sensor CM-520 Series
Wetted material of sensor PFA
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