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HORIBA

HORIBA Highly sensitive silica monitor for ultra-pure water management in semiconductor/FPD processes SLIA-300

HORIBA Highly sensitive silica monitor for ultra-pure water management in semiconductor/FPD processes SLIA-300

$5,846.15 USD
$5,846.15 USD
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* Please consult before ordering

Highly sensitive silica monitor for ultra-pure water management in semiconductor/FPD processes

SLIA-300

A proven track record in silica analysis of ultra-pure water!
Compact/highly sensitive new performance.

Concentration of silica in ultra-pure water has a significant impact on product precision and yield in semiconductor/FPD processes. Reliably meeting measurement requirements of 1μg/L (1ppb). High-sensitivity measurements across the entire measurement range in a compact desktop body design have been achieved. With excellent basic performance and high sensitivity, including high-speed responsiveness and self-diagnostic capabilities, it strongly supports the ultra-pure water processes in semiconductor/FPD manufacturing.

SILICA

Model SLIA-300
Measurement method Molybdic blue absorptiometry
Measurement range 0 to 2 / 0 to 20 µg/L, or 0 to 5 / 0 to 50 µg/L (please specify when placing an order)
Measurement time 5 minutes
Measurement points 1 to 6 points (please specify when placing an order)
Reproducibility ±2% of full scale
Calibration function Standard fluid calibration
Compensation function Blank compensation
Metage line compensation (Specific to each line)
Reagent used · Reagent A: sulfuric acid + ammonium molybdate
· Reagent B: oxalic acid
· Reagent C: L (+) - ascorbic acid
Reagent replacement interval One week (according to the recommended period of our company)
Power 100 to 240 V AC 50/60 Hz
Max. power consumption Approx. 600 VA
Installation condition Indoor, Ambient temperature 10 to 35°C, Humidity 85% or lower
Sample water condition · Water temperature: 15 to 35°C
· Supplied flow rate: 250 to 300 mL/min (must be adjustable)
· Pressure: 0.1 to 0.5 MPa
Outside dimensions 580 (W) x 375 (H) x 500 (D) mm
Weight One-point measurement: approx. 41 kg (plus 1 kg for an additional measurement point)
External I/O Density output 4 to 20 mA DC / 0 to 16 mA DC / 0 to 1 V DC (to be specified at order)
Contact output · Common to all lines:
During measurement, synchronous signals, alarms (batch), heaters, power off, calibration signals 1 and 2, density upper limit warning, or sample water off.
· Specific to each line:
Measurement range, density upper limit warning, or sample water off (the density limit warning or the sample water off batch or respective line alarm should be specified when placing an order. The alarm contents should be also selected when placing the order.)
Contact input · Common to all lines:Calibration start, measurement start, cost-efficient operation, line selection, measurement low range, measurement high range
Serial I/O RS-232C
Option Sample water heating unit, standard fluid supply unit, reagent blending tools
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