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HORIBA

HORIBA Flat Carbon Sensor Conductivity Meter HE-960LF / FS-09F-1/2

HORIBA Flat Carbon Sensor Conductivity Meter HE-960LF / FS-09F-1/2

$2,461.54 USD
$2,461.54 USD
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* Please consult before ordering

Flat Carbon Sensor Conductivity Meter

HE-960LF / FS-09F-1/2

A conductivity meter ideal for the concentration management of slurry, featuring a highly chemical resistant flat carbon sensor.

By maintaining the appropriate conductivity values, it contributes to the stabilization of slurry dilution levels and the polishing process of the wafers.

■Specification conveter

Product name Conductivity meter
Model HE-960LF
Measurement method Electrode type（2-electrode method）
Temperature
specifications sensor		 Platinum resistance 1000Ω/℃
Measurement
range		 Cell constant 0.1/cm 1.0/cm
Conductivity 0.00 to 20.00μS/cm 0.0 to 200.0μS/cm
0.0 to 200.0μS/cm 0 to 2000μS/cm
0 to 1000μS/cm 0 to 10000μS/cm
＊Measuring range of raw conductivity Switched with setting change
Temperature 0 to 100℃ Actual temperature measuring range depend on the performance of the sensor connected.
Concentration
conversion		 Option 1,2 0 to 10.000% Conversion formula is defined by user
(temperature compensation and concentration conversion)
Repeatability Cell constant 0.1/cm 1.0/cm  
Conductivity 0.00 to 20.00μS/cm range 0.0 to 200.0μS/cm range Within ±0.5% full scale
0.0 to 200.0μS/cm range 0 to 2000μS/cm range
0 to 1000μS/cm range 0 to 10000μS/cm range Within ±1.0% full scale
Temperature ±0.5℃
Condition Equivalent input
Linearity Cell constant 0.1/cm 1.0/cm  
Conductivity 0.00 to 20.00μS/cm range 0.0 to 200.0μS/cm range Within ±0.5% full scale
0.0 to 200.0μS/cm range 0 to 2000μS/cm range
0 to 1000μS/cm range 0 to 10000μS/cm range Within ±1.0% full scale
Temperature ±0.5℃
Condition Equivalent input
Transmission output Number of output：4
DC4 to 20mA / 0 to 20mA input/output isolated type
Maximum load resistance : 900Ω
Transmission output range : Free setting within measuring range
(Negative terminals of each transmission output channel are connected inside and thus
have the same electrical potential.)
Contact output Number of relay：5
ALARM contact R1,R2,R3 and R4
Contact type relay : Relay contact, SPST (1a）
Contact rating：240 V AC,1 A or 30 V DC, 1 A(resistance load)
Contact function Upper or lower ON/OFF alarm each measurement items.
Contact action Closed when status is in the event.
Opened when any erroneous status is normal or power is down.
R1,R2 and R3 share a common terminal.
Self diagnosis contact RF
Contact type : relay contact , SPDT (1c)
Contact rating：240 V AC,1 A or 30 V DC, 1 A(resistance load)
C-NO contact action : Closed when status is normal. Opened when any erroneous status is
detected or power is down. R4 and RF share a common terminal.
Contact input Number of input：1
Contact type：open collector. No-voltage contact
Function : Hold command
Communication output RS-485 communication
Self-check Sensor diagnosis (Short-circuit and disconnection of the temperature sensor).
Converter error
Temperature
compensation
of conductivity		 ● Arbitrary temperature coefficient entry
(reference temperature : 25℃, temperature coefficient : 0%/℃ to 5%/℃）
● Arbitrary temperature compensation formula entry
(reference temperature : 25℃, formula is defined by user)
● No temperature compensation is performed.
Temperature
compensation range		 0 to 100℃
The temperature compensation under 0℃ and over 100℃ is expanded by a function
Ambient temperature 5 to 45℃
Relative humidity －25 to 65℃
Power supply Rated voltage 24 V DC, 10W (max.)
Structure Indoor-use panel installation type
Panel case ： ABS, terminal : PBT
Panel : IP65 dust and water proof structure
Conforming standards CE Marking EMC Directive : EN61326-2-3
FCC Rule FCC Part15
Mass Approx. 550g
External dimensions 96 (W) × 96 (H) × 115 (D) mm
Case depth : approx. 105mm (when panel-mounted）
Compatible sensors FS-09F-1/2
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