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HORIBA

HORIBA Fiber Optic Type Chemical Concentration Monitor CS-600F

HORIBA Fiber Optic Type Chemical Concentration Monitor CS-600F

$5,846.15 USD
$5,846.15 USD
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* Please consult before ordering

Fiber Optic Type Chemical Concentration Monitor

CS-600F

An optical fiber-based chemical concentration monitor designed to measure chemicals used in semiconductor manufacturing processes such as cleaning and etching.

Measurements of high-temperature chemicals essential for cutting-edge wet processes can be achieved.  Enabling quick, stable, and space-saving solutions, leading to the optimization and increased precision of chemical management.

Model CS-600F
Measurement
principle		 Absorption spectroscopic method
Calculation
principle		 Temperature compensation type multivariate analysis
Measurement target NH3/H2O2/H2O (reperesentative specification)
* Please contact HORIBA regarding other chemicals.
Measurement range NH3：0.00～1.20mass%、H2O2：0.00～5.50mass%、
H2O：93.3～100.0mass%
Repeatability NH3：±0.05mass%、H2O2：±10mass%、H2O：±1.0mass%
Chemical temperature: Within ±1℃/1 hour
Sample solution
temperature		 20〜80℃
Measurement cycle Approx. 3 seconds
LCD
display		 (1) Measured value (%)
(2) Concentration alarm (HH/H/L/LL)
(3) Error code (EXXX)
(4) Chemical temperature (°C)
(5) Serial/parallel communication status (P/S)
(6) The times of background correction failure (CXXX)
Key input (1) Concentration alarm setting (HH/H/L/LL)
(2) Concentration value shift
(3) Background correction
(4) Hot water correction
(5) Temperature dependent concentration shift
Parallel
input		 Input voltage of 12 V to 30 V DC by insulating with photo coupler
(1) Parallel concentration alarm output (On/Off)
(2) Switching chemical solution for measurement
(including background correction)
(3) Hot water correction
Parallel
output		 Transistor output (NPN open collector) by insulating with photo coupler
Maximum current when powered ON: 5 mA DC (no internal protective resistance)
Maximum voltage when powered OFF: 30 V DC
(1) Concentration alarm (ON at HH/H/L/LL alarm)
(2) Monitor error (OFF at error)
(3) Measuring (ON at measurement)
(4) Chemical solution type for measurement
(5) Echo to hot water correction input
(6) Warning (ON at occurred)
(7) Background correction status 8) Hot water correction status
Serial input RS-232C
(1) Request for readout of measurement data
(2) Select chemical solution type to be measured
(3) Hot water correction
Serial
output

RS-232C
(1) Measured data No.
(2) Chemical solution type
(3) Concentration value
(4) Error code
(5) Chemical temperature
Analog
output		 4 mA to 20 mA
In case of monitor error occurs, measurement is stopped or
invalid chemical range is selected, the signal output is fixed at 1.5 mA. The load resistor must be 500 Ω maximum.
Chemical solution
temperature input		 Terminal block inlet (terminal screw M3)
Platinum resistance temperature sensor: Pt100
(Three-conductor type, Class A) *Temperature sensor is not included.
Air
(for operation and purge)		 Connection port: 4 mm O.D. quick joint,
Pressure: 0.2 MPa ±0.02 Mpa
Power source 100～230V AC（Single-Phase）、50/60Hz
Power consumption Approx. 85 VA
(transient electric current at the time of the start is excluded)
Weight (Monitor) Approx. 3.6 kg
(Lamp unit) Approx. 2.8 kg
(Sample cell) Approx. 1.2 kg
Ambient temperature (Monitor, Lamp unit) 20°C to 30°C
(Sample cell, Optical fiber) 20°C to 35°C
(Sudden temperature change should be avoided, within ±1°C/1 hour)
Ambient humidity (Monitor, Lamp unit, Sample cell) 40% to 70%
(Should be no dew condensation)
Slanting angle at installation (Monitor, Lamp unit) within ±1°
Optical fiber Length: 5 m, minimum bend radius: R 150 mm
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