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Dissolved Oxygen Concentration Monitor Series for Semiconductor Manufacturing

HD-960LR

A dissolved oxygen monitor designed for high-flow applications, ideal for monitoring the concentration of dissolved oxygen in HF solutions during wet processes.

By incorporating a new mechanism inside the sensor, electrolyte degradation can be suppressed while having the capability of measuring dissolved oxygen even in ammonia water and specific organic solvents.  A wide range of support can be provided, from facility to process.